Designed for automated processing of semiconductor wafers and coupon substrates, this enclosed wash and dry station safely handles highly flammable and corrosive process chemicals while maintaining complete operator isolation throughout the cleaning cycle.
Every aspect of the fluid delivery system was engineered around process safety and chemical compatibility. Aggressive chemicals are routed exclusively through stainless steel tubing, valves, and wetted components, while all process actuation is pneumatic to eliminate ignition sources within hazardous areas. This architecture minimizes electrical exposure near flammable vapors while providing reliable, repeatable process control.
Operator protection was the primary design objective. Multiple safety interlocks prevent process execution unless all access doors are secured, ensuring complete separation between personnel and hazardous process environments. Because portions of the process operate within a nitrogen atmosphere, the system continuously evacuates the enclosure under negative pressure while integrated oxygen monitoring verifies safe operating conditions and immediately halts operation should abnormal conditions be detected.
The enclosure itself was engineered as a light explosion-resistant structure capable of safely containing pressure generated by an internal deflagration while directing energy away from the operator. Careful consideration was also given to maintenance access, serviceability, and integration of process equipment, resulting in a machine that balances safety, reliability, and manufacturability within a compact footprint.
This project required the integration of mechanical design, pneumatic controls, chemical process hardware, safety systems, and industrial automation into a cohesive production-ready platform capable of operating safely in one of the most demanding manufacturing environments.
Protoform Design is best suited for companies facing a meaningful mechanical or manufacturing problem that requires experience, independent thinking, and direct technical ownership. The service is positioned as professional engineering expertise rather than commodity CAD labor, temporary staffing, or low-cost production work.